Issued Patents 2019
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10481088 | Automatic determination of fourier harmonic order for computation of spectral information for diffraction structures | Mark Backues, Paul Aoyagi | 2019-11-19 |
| 10410935 | Dispersion model for band gap tracking | Natalia Malkova, Ming Di, Qiang Zhao, Dawei Hu | 2019-09-10 |
| 10393647 | System, method, and computer program product for automatically determining a parameter causing an abnormal semiconductor metrology measurement | Qiang Zhao, Liequan Lee, Jonathan Iloreta, Hong Qiu | 2019-08-27 |
| 10386729 | Dynamic removal of correlation of highly correlated parameters for optical metrology | Lie-Quan Lee, Stilian Ivanov Pandev | 2019-08-20 |
| 10345095 | Model based measurement systems with improved electromagnetic solver performance | Stilian Ivanov Pandev, Dzmitry Sanko, Andrei V. Shchegrov | 2019-07-09 |
| 10190868 | Metrology system, method, and computer program product employing automatic transitioning between utilizing a library and utilizing regression for measurement processing | Liequan Lee, Raphael Jean Michel Marie Getin, Meng Cao, Torsten R. Kaack, Hong Qiu | 2019-01-29 |