Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10393647 | System, method, and computer program product for automatically determining a parameter causing an abnormal semiconductor metrology measurement | Qiang Zhao, Liequan Lee, Jonathan Iloreta, Leonid Poslavsky | 2019-08-27 |
| 10190868 | Metrology system, method, and computer program product employing automatic transitioning between utilizing a library and utilizing regression for measurement processing | Liequan Lee, Raphael Jean Michel Marie Getin, Meng Cao, Leonid Poslavsky, Torsten R. Kaack | 2019-01-29 |