Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10393647 | System, method, and computer program product for automatically determining a parameter causing an abnormal semiconductor metrology measurement | Qiang Zhao, Liequan Lee, Hong Qiu, Leonid Poslavsky | 2019-08-27 |