Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10502692 | Automated metrology system selection | Lie-Quan Lee, Qiang Zhao, Heyin Li, Mengmeng Ye | 2019-12-10 |
| 10345721 | Measurement library optimization in semiconductor metrology | Lie-Quan Lee, Qiang Zhao, Heyin Li, Mengmeng Ye | 2019-07-09 |
| 10190868 | Metrology system, method, and computer program product employing automatic transitioning between utilizing a library and utilizing regression for measurement processing | Liequan Lee, Raphael Jean Michel Marie Getin, Leonid Poslavsky, Torsten R. Kaack, Hong Qiu | 2019-01-29 |