Issued Patents 2019
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10502692 | Automated metrology system selection | Meng Cao, Qiang Zhao, Heyin Li, Mengmeng Ye | 2019-12-10 |
| 10386729 | Dynamic removal of correlation of highly correlated parameters for optical metrology | Leonid Poslavsky, Stilian Ivanov Pandev | 2019-08-20 |
| 10345721 | Measurement library optimization in semiconductor metrology | Meng Cao, Qiang Zhao, Heyin Li, Mengmeng Ye | 2019-07-09 |
| 10255385 | Model optimization approach based on spectral sensitivity | Stilian Ivanov Pandev, Thaddeus Gerard Dziura, Meng-Fu Shih | 2019-04-09 |