Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10451412 | Apparatus and methods for detecting overlay errors using scatterometry | Michael Adel, Ibrahim Abdulhalim, Ady Levy, Michael Friedmann | 2019-10-22 |
| 10401740 | System and method for focus determination using focus-sensitive overlay targets | — | 2019-09-03 |
| 10352876 | Signal response metrology for scatterometry based overlay measurements | Andrei V. Shchegrov, Stilian Ivanov Pandev, Jonathan M. Madsen, Alexander Kuznetsov | 2019-07-16 |