Issued Patents 2019
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10409171 | Overlay control with non-zero offset prediction | Michael Adel, Amnon Manassen, William Pierson, Ady Levy, Liran Yerushalmi +4 more | 2019-09-10 |
| 10381256 | Apparatus and method for chucking warped wafers | Luping Huang, Chris Pohlhammer | 2019-08-13 |
| 10216096 | Process-sensitive metrology systems and methods | Myungjun Lee, Mark D. Smith, Sanjay Kapasi, Stilian Ivanov Pandev, Dzmitry Sanko +1 more | 2019-02-26 |
| 10209627 | Systems and methods for focus-sensitive metrology targets | Myungjun Lee, Stewart Robertson, Mark D. Smith | 2019-02-19 |