Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10209627 | Systems and methods for focus-sensitive metrology targets | Myungjun Lee, Mark D. Smith, Pradeep Subrahmanyan | 2019-02-19 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10209627 | Systems and methods for focus-sensitive metrology targets | Myungjun Lee, Mark D. Smith, Pradeep Subrahmanyan | 2019-02-19 |