Issued Patents 2019
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10407773 | Methods and apparatuses for showerhead backside parasitic plasma suppression in a secondary purge enabled ALD system | Adrien LaVoie, Hu Kang, Purushottam Kumar, Shankar Swaminathan, Frank L. Pasquale +1 more | 2019-09-10 |
| 10374506 | Adaptive control method for zero voltage switching | Ze Zhou, Xiao-Lin Liu, Yue Shi, Zhuo Wang, Bo Zhang | 2019-08-06 |
| 10361076 | Gapfill of variable aspect ratio features with a composite PEALD and PECVD method | Hu Kang, Shankar Swaminathan, Wanki Kim, Dennis M. Hausmann, Bart J. van Schravendijk +1 more | 2019-07-23 |
| 10351953 | Systems and methods for flow monitoring in a precursor vapor supply system of a substrate processing system | Purushottam Kumar, Adrien LaVoie, You Zhai, Jeremiah Baldwin, Sung Je Kim | 2019-07-16 |
| 10339465 | Optimized decision tree based models | Robert Matthias Steele, Tarun Agarwal, Leo Parker Dirac | 2019-07-02 |
| 10308764 | Method for preparing biobased nylon: polylactam | Liming Zhao, Jie Wei, Juan Ma, Xiaofeng Tang, Yingyang Wu +1 more | 2019-06-04 |
| 10256111 | Chemical mechanical polishing automated recipe generation | Eric Lau, King Yi Heung, Charles C. Garretson, Thomas H. Osterheld, Shuchivrat Datar +1 more | 2019-04-09 |