Issued Patents 2019
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10483091 | Selective ion filtering in a multipurpose chamber | Lawrence A. Clevenger, Theodorus E. Standaert, Wei Wang, Chih-Chao Yang | 2019-11-19 |
| 10395985 | Self aligned conductive lines with relaxed overlay | Sean D. Burns, Lawrence A. Clevenger, Matthew E. Colburn, Sivananda K. Kanakasabapathy, Yann Mignot +2 more | 2019-08-27 |
| 10373909 | Selective surface modification of interconnect structures | Raghuveer R. Patlolla, Cornelius Brown Peethala, Chih-Chao Yang | 2019-08-06 |
| 10361153 | Surface nitridation in metal interconnects | Lawrence A. Clevenger, Terry A. Spooner, Wei Wang, Chih-Chao Yang | 2019-07-23 |
| 10256185 | Nitridization for semiconductor structures | Lawrence A. Clevenger, Hosadurga Shobha, Terry A. Spooner, Wei Wang, Chih-Chao Yang | 2019-04-09 |
| 10249532 | Modulating the microstructure of metallic interconnect structures | Michael Rizzolo, Chih-Chao Yang | 2019-04-02 |