Issued Patents 2019
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10509327 | Variable neutral density filter for multi-beam interference lithography exposure | Matthieu Charles Raoul Leibovici | 2019-12-17 |
| 10395985 | Self aligned conductive lines with relaxed overlay | Sean D. Burns, Lawrence A. Clevenger, Sivananda K. Kanakasabapathy, Yann Mignot, Christopher J. Penny +2 more | 2019-08-27 |
| 10274651 | Manufacturing three-dimensional diffraction gratings by selective deposition or selective etching | Nihar Mohanty, Giuseppe Calafiore, Austin Lane, Matthieu Charles Raoul Leibovici | 2019-04-30 |