Issued Patents 2019
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10502958 | H2-assisted slanted etching of high refractive index material | — | 2019-12-10 |
| 10366890 | Method for patterning a substrate using a layer with multiple materials | Anton J. deVilliers | 2019-07-30 |
| 10354873 | Organic mandrel protection process | Akiteru Ko, Angelique Raley, Sophie Thibaut, Satoru Nakamura | 2019-07-16 |
| 10319637 | Method for fully self-aligned via formation using a directed self assembly (DSA) process | Elliott Franke, Richard A. Farrell | 2019-06-11 |
| 10274651 | Manufacturing three-dimensional diffraction gratings by selective deposition or selective etching | Giuseppe Calafiore, Matthew E. Colburn, Austin Lane, Matthieu Charles Raoul Leibovici | 2019-04-30 |
| 10256140 | Method of reducing overlay error in via to grid patterning | — | 2019-04-09 |
| 10256110 | Self-aligned patterning process utilizing self-aligned blocking and spacer self-healing | — | 2019-04-09 |
| 10236186 | Methods for dry hard mask removal on a microelectronic substrate | — | 2019-03-19 |