Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10509327 | Variable neutral density filter for multi-beam interference lithography exposure | Matthew E. Colburn | 2019-12-17 |
| 10274651 | Manufacturing three-dimensional diffraction gratings by selective deposition or selective etching | Nihar Mohanty, Giuseppe Calafiore, Matthew E. Colburn, Austin Lane | 2019-04-30 |