Issued Patents 2019
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10453686 | In-situ spacer reshaping for self-aligned multi-patterning methods and systems | Eric Chih-Fang Liu, Angelique Raley | 2019-10-22 |
| 10354873 | Organic mandrel protection process | Angelique Raley, Sophie Thibaut, Satoru Nakamura, Nihar Mohanty | 2019-07-16 |
| 10290506 | Method for etching high-K dielectric using pulsed bias power | Alok Ranjan | 2019-05-14 |
| 10260150 | Method and system for sculpting spacer sidewall mask | Vinh Luong | 2019-04-16 |
| 10217670 | Wrap-around contact integration scheme | Kandabara Tapily, Satoru Nakamura, Soo Doo Chae, Kaoru Maekawa, Gerrit J. Leusink | 2019-02-26 |
| 10170329 | Spacer formation for self-aligned multi-patterning technique | Eric Chih-Fang Liu | 2019-01-01 |