Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10453686 | In-situ spacer reshaping for self-aligned multi-patterning methods and systems | Angelique Raley, Akiteru Ko | 2019-10-22 |
| 10170329 | Spacer formation for self-aligned multi-patterning technique | Akiteru Ko | 2019-01-01 |