Issued Patents 2019
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10524343 | Extreme ultraviolet light generation apparatus | Takanobu Ishihara, Toshihiro Nishisaka | 2019-12-31 |
| 10372041 | Target generation device and extreme ultraviolet light generation device | Toshihiro Nishisaka | 2019-08-06 |
| 10349508 | Target storage device | Toshihiro Nishisaka, Toshiyuki Hirashita, Takuya Ishii | 2019-07-09 |
| 10237961 | Target supply device, processing device and processing method therefor | Tsukasa HORI, Shinya Ikesaka, Takanobu Ishihara, Toshiro Umeki | 2019-03-19 |
| 10225917 | Target supply device and extreme ultraviolet light generating device | Takahisa FUJIMAKI, Takayuki Yabu, Yuta Takashima, Fumio Iwamoto | 2019-03-05 |