Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10524343 | Extreme ultraviolet light generation apparatus | Toshihiro Nishisaka, Yutaka Shiraishi | 2019-12-31 |
| 10237961 | Target supply device, processing device and processing method therefor | Tsukasa HORI, Yutaka Shiraishi, Shinya Ikesaka, Toshiro Umeki | 2019-03-19 |