Issued Patents 2019
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10512149 | Extreme UV light generation device | Shinji Okazaki | 2019-12-17 |
| 10506697 | Extreme ultraviolet light generation device | Fumio Iwamoto, Toshiyuki Hirashita | 2019-12-10 |
| 10306743 | System and method for generating extreme ultraviolet light | Kouji Kakizaki, Tatsuya Yanagida, Osamu Wakabayashi, Hakaru Mizoguchi | 2019-05-28 |
| 10251253 | Extreme ultraviolet light generation device | Fumio Iwamoto, Toshiyuki Hirashita | 2019-04-02 |
| 10251255 | System and method for generating extreme ultraviolet light | Kouji Kakizaki, Tatsuya Yanagida, Osamu Wakabayashi, Hakaru Mizoguchi | 2019-04-02 |
| 10237961 | Target supply device, processing device and processing method therefor | Yutaka Shiraishi, Shinya Ikesaka, Takanobu Ishihara, Toshiro Umeki | 2019-03-19 |