Issued Patents 2019
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10506697 | Extreme ultraviolet light generation device | Fumio Iwamoto, Tsukasa HORI | 2019-12-10 |
| 10369596 | Vibrator unit and target supply device | — | 2019-08-06 |
| 10349508 | Target storage device | Yutaka Shiraishi, Toshihiro Nishisaka, Takuya Ishii | 2019-07-09 |
| 10251253 | Extreme ultraviolet light generation device | Fumio Iwamoto, Tsukasa HORI | 2019-04-02 |