Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10506697 | Extreme ultraviolet light generation device | Tsukasa HORI, Toshiyuki Hirashita | 2019-12-10 |
| 10251253 | Extreme ultraviolet light generation device | Tsukasa HORI, Toshiyuki Hirashita | 2019-04-02 |
| 10225917 | Target supply device and extreme ultraviolet light generating device | Takahisa FUJIMAKI, Takayuki Yabu, Yuta Takashima, Yutaka Shiraishi | 2019-03-05 |