Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10225917 | Target supply device and extreme ultraviolet light generating device | Takayuki Yabu, Yuta Takashima, Fumio Iwamoto, Yutaka Shiraishi | 2019-03-05 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10225917 | Target supply device and extreme ultraviolet light generating device | Takayuki Yabu, Yuta Takashima, Fumio Iwamoto, Yutaka Shiraishi | 2019-03-05 |