Issued Patents 2019
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10303061 | Extreme ultraviolet light generation device | Yuichi Nishimura, Yoshifumi Ueno | 2019-05-28 |
| 10271414 | Droplet detector and extreme ultraviolet light generating apparatus | Kouichi Satou, Yoshifumi Ueno, Hirokazu HOSODA | 2019-04-23 |
| 10251254 | Extreme ultraviolet light generating apparatus and control method for centroid of extreme ultraviolet light | Yuichi Nishimura | 2019-04-02 |
| 10225918 | Extreme ultraviolet light generating apparatus | Yuichi Nishimura | 2019-03-05 |
| 10225917 | Target supply device and extreme ultraviolet light generating device | Takahisa FUJIMAKI, Yuta Takashima, Fumio Iwamoto, Yutaka Shiraishi | 2019-03-05 |
| 10191381 | Extreme ultraviolet light generating device | — | 2019-01-29 |
| 10172224 | Extreme UV light generator | Hirokazu HOSODA, Takuya Ishii | 2019-01-01 |