Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10271414 | Droplet detector and extreme ultraviolet light generating apparatus | Takayuki Yabu, Yoshifumi Ueno, Hirokazu HOSODA | 2019-04-23 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10271414 | Droplet detector and extreme ultraviolet light generating apparatus | Takayuki Yabu, Yoshifumi Ueno, Hirokazu HOSODA | 2019-04-23 |