Issued Patents 2019
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10455679 | Extreme ultraviolet light generation device | Takashi Saito, Georg Soumagne | 2019-10-22 |
| 10415793 | Illumination apparatus | Yasushi Ito, Hirofumi Tani, Tomomitsu Hori | 2019-09-17 |
| 10375809 | Extreme ultraviolet light generation device and method for controlling extreme ultraviolet light generation device | Yuta Takashima, Go Shirozu | 2019-08-06 |
| 10303061 | Extreme ultraviolet light generation device | Yuichi Nishimura, Takayuki Yabu | 2019-05-28 |
| 10271414 | Droplet detector and extreme ultraviolet light generating apparatus | Kouichi Satou, Takayuki Yabu, Hirokazu HOSODA | 2019-04-23 |
| 10268118 | Extreme ultraviolet light generating apparatus | — | 2019-04-23 |
| 10194515 | Beam delivery system and control method therefor | Takashi Suganuma, Yoshiaki Kurosawa | 2019-01-29 |