Issued Patents 2019
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10461494 | Laser apparatus and extreme ultraviolet light generation system | Yoshiaki Kurosawa | 2019-10-29 |
| 10401615 | Beam dump apparatus, laser apparatus equipped with the beam dump apparatus, and extreme ultraviolet light generating apparatus | Yoshiaki Kurosawa | 2019-09-03 |
| 10374381 | Extreme ultraviolet light generating apparatus | Toru Suzuki, Akihiro Takayama, Yoshiaki Kurosawa | 2019-08-06 |
| 10194515 | Beam delivery system and control method therefor | Yoshifumi Ueno, Yoshiaki Kurosawa | 2019-01-29 |