Issued Patents 2019
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10461494 | Laser apparatus and extreme ultraviolet light generation system | Takashi Suganuma | 2019-10-29 |
| 10401615 | Beam dump apparatus, laser apparatus equipped with the beam dump apparatus, and extreme ultraviolet light generating apparatus | Takashi Suganuma | 2019-09-03 |
| 10374381 | Extreme ultraviolet light generating apparatus | Toru Suzuki, Takashi Suganuma, Akihiro Takayama | 2019-08-06 |
| 10337805 | Heat storage device | Motohiro Suzuki, Hironori Tomita, Atsunori Hashimoto | 2019-07-02 |
| 10194515 | Beam delivery system and control method therefor | Yoshifumi Ueno, Takashi Suganuma | 2019-01-29 |