Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10375809 | Extreme ultraviolet light generation device and method for controlling extreme ultraviolet light generation device | Yoshifumi Ueno, Go Shirozu | 2019-08-06 |
| 10225917 | Target supply device and extreme ultraviolet light generating device | Takahisa FUJIMAKI, Takayuki Yabu, Fumio Iwamoto, Yutaka Shiraishi | 2019-03-05 |