Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10375809 | Extreme ultraviolet light generation device and method for controlling extreme ultraviolet light generation device | Yuta Takashima, Yoshifumi Ueno | 2019-08-06 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10375809 | Extreme ultraviolet light generation device and method for controlling extreme ultraviolet light generation device | Yuta Takashima, Yoshifumi Ueno | 2019-08-06 |