Issued Patents 2019
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10420198 | Extreme ultraviolet light generating apparatus | Toru Suzuki | 2019-09-17 |
| 10271414 | Droplet detector and extreme ultraviolet light generating apparatus | Kouichi Satou, Takayuki Yabu, Yoshifumi Ueno | 2019-04-23 |
| 10209625 | Extreme ultraviolet light generating apparatus | — | 2019-02-19 |
| 10172224 | Extreme UV light generator | Takayuki Yabu, Takuya Ishii | 2019-01-01 |