Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10524343 | Extreme ultraviolet light generation apparatus | Takanobu Ishihara, Yutaka Shiraishi | 2019-12-31 |
| 10372041 | Target generation device and extreme ultraviolet light generation device | Yutaka Shiraishi | 2019-08-06 |
| 10349508 | Target storage device | Yutaka Shiraishi, Toshiyuki Hirashita, Takuya Ishii | 2019-07-09 |