Issued Patents 2019
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10495890 | Laser system or laser exposure system | Osamu Wakabayashi, Junichi Fujimoto | 2019-12-03 |
| 10306743 | System and method for generating extreme ultraviolet light | Tsukasa HORI, Tatsuya Yanagida, Osamu Wakabayashi, Hakaru Mizoguchi | 2019-05-28 |
| 10251255 | System and method for generating extreme ultraviolet light | Tsukasa HORI, Tatsuya Yanagida, Osamu Wakabayashi, Hakaru Mizoguchi | 2019-04-02 |
| 10177520 | Excimer laser apparatus and excimer laser system | Takeshi Asayama, Osamu Wakabayashi | 2019-01-08 |