Issued Patents 2019
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10512148 | System and method for generating extreme ultraviolet light employing laser pulse including pedestal | Hitoshi Nagano, Yasunori Wada, Osamu Wakabayashi | 2019-12-17 |
| 10306743 | System and method for generating extreme ultraviolet light | Tsukasa HORI, Kouji Kakizaki, Osamu Wakabayashi, Hakaru Mizoguchi | 2019-05-28 |
| 10251255 | System and method for generating extreme ultraviolet light | Tsukasa HORI, Kouji Kakizaki, Osamu Wakabayashi, Hakaru Mizoguchi | 2019-04-02 |
| 10172225 | Extreme ultraviolet light generation apparatus | Toru Suzuki, Tamotsu Abe, Osamu Wakabayashi | 2019-01-01 |