Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10512148 | System and method for generating extreme ultraviolet light employing laser pulse including pedestal | Hitoshi Nagano, Tatsuya Yanagida, Osamu Wakabayashi | 2019-12-17 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10512148 | System and method for generating extreme ultraviolet light employing laser pulse including pedestal | Hitoshi Nagano, Tatsuya Yanagida, Osamu Wakabayashi | 2019-12-17 |