Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10512148 | System and method for generating extreme ultraviolet light employing laser pulse including pedestal | Yasunori Wada, Tatsuya Yanagida, Osamu Wakabayashi | 2019-12-17 |
| 10314152 | Extreme ultraviolet light generation apparatus | Shinji Nagai, Tamotsu Abe, Osamu Wakabayashi | 2019-06-04 |