Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10314152 | Extreme ultraviolet light generation apparatus | Shinji Nagai, Hitoshi Nagano, Osamu Wakabayashi | 2019-06-04 |
| 10172225 | Extreme ultraviolet light generation apparatus | Toru Suzuki, Osamu Wakabayashi, Tatsuya Yanagida | 2019-01-01 |