Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10314152 | Extreme ultraviolet light generation apparatus | Tamotsu Abe, Hitoshi Nagano, Osamu Wakabayashi | 2019-06-04 |
| 10268119 | Extreme ultraviolet light generating device | Atsushi Ueda, Takashi Saito | 2019-04-23 |