Issued Patents 2019
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10416569 | Attenuation filter for projection lens, projection lens having attenuation filter for projection exposure apparatus, and projection exposure apparatus having projection lens | Ricarda Schoemer | 2019-09-17 |
| 10345710 | Microlithographic projection exposure apparatus and measuring device for a projection lens | Albrecht Ehrmann, Ulrich Wegmann, Rainer Hoch, Joerg Mallmann, Karl-Heinz Schuster +6 more | 2019-07-09 |
| 10288894 | Optical component for use in a radiation source module of a projection exposure system | Michael Patra, Alexander Wolf, Markus Schwab, Joachim Hartjes | 2019-05-14 |
| 10281824 | Microlithography projection objective | Heiko Feldmann, Daniel Kraehmer, Jean-Claude Perrin, Julian Kaller, Aurelian Dodoc +4 more | 2019-05-07 |
| 10261425 | Projection exposure apparatus with a highly flexible manipulator | Alexander Wolf, Boris Bittner, Norbert Wabra | 2019-04-16 |