Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10288894 | Optical component for use in a radiation source module of a projection exposure system | Michael Patra, Alexander Wolf, Markus Schwab, Toralf Gruner | 2019-05-14 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10288894 | Optical component for use in a radiation source module of a projection exposure system | Michael Patra, Alexander Wolf, Markus Schwab, Toralf Gruner | 2019-05-14 |