Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10330903 | Imaging optical unit for imaging an object field into an image field, and projection exposure apparatus including such an imaging optical unit | Hans-Juergen Rostalski | 2019-06-25 |
| 10288894 | Optical component for use in a radiation source module of a projection exposure system | Michael Patra, Markus Schwab, Toralf Gruner, Joachim Hartjes | 2019-05-14 |
| 10261425 | Projection exposure apparatus with a highly flexible manipulator | Toralf Gruner, Boris Bittner, Norbert Wabra | 2019-04-16 |