Issued Patents 2019
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10474036 | Optical element and optical arrangement therewith | Hans-Jochen Paul, Boris Bittner, Thomas Schicketanz | 2019-11-12 |
| 10401540 | Optical element having a coating for influencing heating radiation and optical arrangement | Boris Bittner, Holger Schmidt, Ricarda Schoemer, Sonja Schneider | 2019-09-03 |
| 10345710 | Microlithographic projection exposure apparatus and measuring device for a projection lens | Albrecht Ehrmann, Ulrich Wegmann, Rainer Hoch, Joerg Mallmann, Karl-Heinz Schuster +6 more | 2019-07-09 |
| 10303063 | Projection exposure apparatus with at least one manipulator | Boris Bittner, Martin von Hodenberg | 2019-05-28 |
| 10261425 | Projection exposure apparatus with a highly flexible manipulator | Alexander Wolf, Toralf Gruner, Boris Bittner | 2019-04-16 |