Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10520827 | Optical system, in particular for a microlithographic projection exposure apparatus | Hartmut Enkisch, Matus Kalisky, Oliver Dier | 2019-12-31 |
| 10474036 | Optical element and optical arrangement therewith | Hans-Jochen Paul, Boris Bittner, Norbert Wabra | 2019-11-12 |
| 10203435 | EUV mirror and optical system comprising EUV mirror | Oliver Dier, Sebastian Strobel, Ralf Winter | 2019-02-12 |