Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10509336 | Optical assembly having a thermally conductive component | Julian Kaller, Franz Sorg, Karl-Stefan Weissenrieder | 2019-12-17 |
| 10203435 | EUV mirror and optical system comprising EUV mirror | Thomas Schicketanz, Oliver Dier, Sebastian Strobel | 2019-02-12 |