Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10423073 | Method for producing a mirror element | Hartmut Enkisch, Peter Huber | 2019-09-24 |
| 10203435 | EUV mirror and optical system comprising EUV mirror | Thomas Schicketanz, Oliver Dier, Ralf Winter | 2019-02-12 |