Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10520827 | Optical system, in particular for a microlithographic projection exposure apparatus | Hartmut Enkisch, Thomas Schicketanz, Matus Kalisky | 2019-12-31 |
| 10331048 | Mirror, in particular for a microlithographic projection exposure apparatus | Kerstin Hild, Hartmut Enkisch, Matus Kalisky | 2019-06-25 |
| 10203435 | EUV mirror and optical system comprising EUV mirror | Thomas Schicketanz, Sebastian Strobel, Ralf Winter | 2019-02-12 |