Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10520827 | Optical system, in particular for a microlithographic projection exposure apparatus | Thomas Schicketanz, Matus Kalisky, Oliver Dier | 2019-12-31 |
| 10423073 | Method for producing a mirror element | Peter Huber, Sebastian Strobel | 2019-09-24 |
| 10331048 | Mirror, in particular for a microlithographic projection exposure apparatus | Oliver Dier, Kerstin Hild, Matus Kalisky | 2019-06-25 |