Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10331048 | Mirror, in particular for a microlithographic projection exposure apparatus | Oliver Dier, Hartmut Enkisch, Matus Kalisky | 2019-06-25 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10331048 | Mirror, in particular for a microlithographic projection exposure apparatus | Oliver Dier, Hartmut Enkisch, Matus Kalisky | 2019-06-25 |