Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10509336 | Optical assembly having a thermally conductive component | Julian Kaller, Ralf Winter, Karl-Stefan Weissenrieder | 2019-12-17 |
| 10345710 | Microlithographic projection exposure apparatus and measuring device for a projection lens | Albrecht Ehrmann, Ulrich Wegmann, Rainer Hoch, Joerg Mallmann, Karl-Heinz Schuster +6 more | 2019-07-09 |
| 10197925 | Optical module for a microlithography objective holding optical elements with supporting devices located in a non-equidistant manner | Jens Kugler, Yim-Bun Patrick Kwan | 2019-02-05 |