Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10345710 | Microlithographic projection exposure apparatus and measuring device for a projection lens | Albrecht Ehrmann, Ulrich Wegmann, Rainer Hoch, Joerg Mallmann, Ulrich Loering +6 more | 2019-07-09 |
| 10337850 | Interferometric measuring arrangement | Jochen Hetzler, Sebastian Fuchs, Hans-Michael Stiepan | 2019-07-02 |