Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10345710 | Microlithographic projection exposure apparatus and measuring device for a projection lens | Albrecht Ehrmann, Ulrich Wegmann, Rainer Hoch, Joerg Mallmann, Karl-Heinz Schuster +6 more | 2019-07-09 |
| 10317802 | EUV exposure apparatus with reflective elements having reduced influence of temperature variation | Norman Baer, Oliver Natt, Gero Wittich, Timo Laufer, Peter Kuerz +7 more | 2019-06-11 |
| 10241423 | Method of operating a projection exposure tool for microlithography | Olaf Conradi, Michael Totzeck, Dirk Juergens, Ralf Mueller, Christian Wald | 2019-03-26 |