Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10281824 | Microlithography projection objective | Heiko Feldmann, Daniel Kraehmer, Jean-Claude Perrin, Julian Kaller, Aurelian Dodoc +4 more | 2019-05-07 |
| 10241423 | Method of operating a projection exposure tool for microlithography | Michael Totzeck, Ulrich Loering, Dirk Juergens, Ralf Mueller, Christian Wald | 2019-03-26 |